Characterization of Zno Films Prepared by de Reactive Magnetron Sputtering at Different Oxygen Partial Pressures

AuthID
 P-001-GKN
2
Author(s)
Document Type
Article
Year published
1995
Published
in VACUUM, ISSN: 0042-207X
Volume: 46, Issue: 8-10, Pages: 1001-1004 (4)
Conference
4Th European Vacuum Conference (Evc-4)1St Swedish Vacuum Meeting (Svm-1), Date: JUN 13-17, 1994, Location: UPPSALA, SWEDEN, Sponsors: Royal Swedish Acad Sci, Swedish Board Tech & Ind Dev, Swedish Res Council Engn Sci, Fisons Instruments, IUVSTA, Leybold, Nordiska Balzers AB, Balzers AG, Balzers Pfeiffer AG, Swedish Nat Sci Res Council, Int Sci Fdn, Swedish Vacuum Soc, Uppsala Univ, City Uppsala
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Publication Identifiers
Scopus: 2-s2.0-0029359441
Wos: WOS:A1995RR06300064
Source Identifiers
ISSN: 0042-207X
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