Polymorphous Silicon Films Deposited at 27.12 Mhz

AuthID
P-00F-H3C
7
Author(s)
Lebib, S
·
I Cabarrocas, PR
·
Guimaraes, L
Document Type
Article
Year published
2003
Published
in Chemical Vapor Deposition, ISSN: 0948-1907
Volume: 9, Issue: 6, Pages: 333-337
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Publication Identifiers
SCOPUS: 2-s2.0-10644291047
Source Identifiers
ISSN: 0948-1907
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