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Polymorphous Silicon Films Deposited at 27.12 Mhz
AuthID
P-00F-H3C
7
Author(s)
Martins, R
·
Aguas, H
·
Ferreira, I
·
Fortunato, E
·
Lebib, S
·
I Cabarrocas, PR
·
Guimaraes, L
Document Type
Article
Year published
2003
Published
in
Chemical Vapor Deposition,
ISSN: 0948-1907
Volume: 9, Issue: 6, Pages: 333-337
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Publication Identifiers
DOI
:
10.1002/cvde.200306261
SCOPUS
: 2-s2.0-10644291047
Source Identifiers
ISSN
: 0948-1907
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