A-Si:h Films Deposited at High Rates in a 'Vhf' Silane Plasma: Potential for Low-Cost Solar Cells

AuthID
P-00F-MPP
10
Author(s)
Shah, A
·
Sauvain, E
·
Wyrsch, N
·
Curtins, H
·
Leutz, B
·
Shen, DS
·
Wagner, S
·
Schade, H
·
Chao, HWA
1
Editor(s)
Anon
Document Type
Proceedings Paper
Year published
1988
Published
in Conference Record of the IEEE Photovoltaic Specialists Conference, ISSN: 0160-8371
Volume: 1, Pages: 282-287
Conference
Twentieth Ieee Photovoltaic Specialists Conference - 1988, Date: 26 September 1988 through 30 September 1988, Location: Las Vegas, NV, USA
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0024186651
Source Identifiers
ISSN: 0160-8371
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