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Limitations of Interface Sharpness in A-Si:h/A-Sic:h Multilayers
AuthID
P-00F-MY8
8
Author(s)
Schwarz, R
·
Fischer, T
·
Hanesch, P
·
Muschik, T
·
Kolodzey, J
·
Cerva, H
·
Meyerheim, HL
·
Scherzer, BMU
Document Type
Article
Year published
1991
Published
in
Applied Surface Science,
ISSN: 0169-4332
Volume: 50, Issue: 1-4, Pages: 456-461
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Scopus
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SCOPUS
: 2-s2.0-0026413794
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ISSN
: 0169-4332
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