Research of Integral Circuits by Means of Secondary Ion Emission

AuthID
 P-00F-N1X
9
Author(s)
Aristarkhova, AA
·
Volkov, SS
·
Kitaeva, TI
·
Klimkovich, BV
·
Mal'chenkov, AP
·
Chumakov, EN
Document Type
Article
Year published
1993
Published
in Radiotekhnika i Elektronika, ISSN: 0033-8494
Volume: 38, Issue: 1, Pages: 160-167
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0027151357
Source Identifiers
ISSN: 0033-8494
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