Thermal Stability of Tungsten Nitride (Wn) Films Deposited by Ion Beam Sputtering on Gaas Substrates

AuthID
 P-00F-N4D
4
Author(s)
Galanin, SG
·
Kuznetsov, GD
·
Chernyak, EY
Document Type
Article
Year published
1993
Published
in Fizika i Khimiya Obrabotki Materialov, ISSN: 0015-3214
Issue: 5, Pages: 94-99
Indexing
Scopus®
Publication Identifiers
Scopus: 2-s2.0-0027667411
Source Identifiers
ISSN: 0015-3214
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