Secondary Ion Mass Spectrometry Characterization of Iro2-Ta2O5 Thin Films: Effect of Relative Composition on Electrode Properties

AuthID
P-00F-NSZ
5
Author(s)
Daolio, S
·
De Battisti, A
·
Fabrizio, M
·
Nanni, L
·
Document Type
Proceedings Paper
Year published
1998
Published
in Rapid Communications in Mass Spectrometry, ISSN: 0951-4198
Volume: 12, Issue: 20, Pages: 1574-1579
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ISSN: 0951-4198
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