High-Resistivity Polycrystalline Silicon as Rf Substrate in Wafer-Level Packaging

AuthID
 P-000-50S
6
Author(s)
Polyakov, A
·
Sinaga, S
·
Bartek, M
·
Document Type
Article
Year published
2005
Published
in ELECTRONICS LETTERS, ISSN: 0013-5194
Volume: 41, Issue: 2, Pages: 100-101 (2)
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Publication Identifiers
SCOPUS: 2-s2.0-13844254234
Wos: WOS:000226830700034
Source Identifiers
ISSN: 0013-5194
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