Simultaneous Layer-By-Layer Analysis of Thin-Film Samples Using Mass-Separated Ion Scattering, Mass-Spectrometry of Secondary Ions Techniques and Measuring the Sample's Full Current Obraztsa

AuthID
P-00F-Q0V
Document Type
Article
Year published
2002
Published
in Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya, ISSN: 0207-3528
Issue: 12, Pages: 33-39
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Scopus: 2-s2.0-0036960815
Source Identifiers
ISSN: 0207-3528
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