Electrical Conduction Mechanism in Silicon Nitride and Oxy-Nitride- Sputtered Thin Films

AuthID
 P-00F-R89
3
Author(s)
Roman, E
·
Prieto, C
Document Type
Article
Year published
2005
Published
in Journal of Applied Physics, ISSN: 0021-8979
Volume: 97, Issue: 11, Pages: 113710
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Publication Identifiers
SCOPUS: 2-s2.0-20744440831
Source Identifiers
ISSN: 0021-8979
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