Study Of Multilayer Substrate Surface-Roughness Using Rbs With Improved Depth Resolution

AuthID
P-001-JE1
5
Author(s)
DASILVA, MF
·
PASZTI, F
·
SZILAGYI, E
Document Type
Article
Year published
1994
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 94, Issue: 3, Pages: 266-270 (5)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0001299648
Wos: WOS:A1994PR78900014
Source Identifiers
ISSN: 0168-583X
Export Publication Metadata
Marked List
Info
At this moment we don't have any links to full text documens.