Effect of Deposition Temperature on Surface Acoustic Wave Velocity of Aluminum Nitride Films Determined by Brillouin Spectroscopy

AuthID
 P-00F-RP7
4
Author(s)
Assouar, MB
·
Alnot, P
Document Type
Article
Year published
2005
Published
in Journal of Applied Physics, ISSN: 0021-8979
Volume: 98, Issue: 9, Pages: 096102
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Publication Identifiers
SCOPUS: 2-s2.0-27844522876
Source Identifiers
ISSN: 0021-8979
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