Electrical Behavior of Silicon Nitride Sputtered Thin Films

AuthID
P-00F-RS4
3
Author(s)
Prieto, C
·
Ramirez, R
1
Editor(s)
Hilgers H.Knoll W.Luth H.
Document Type
Proceedings Paper
Year published
2004
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 459, Issue: 1-2, Pages: 195-199
Conference
Proceedings of the Eight European Vacuum Congress Berlin 2003, Date: 23 June 2004 through 26 June 2004, Location: Berlin
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-2942555021
Source Identifiers
ISSN: 0040-6090
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