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Electrical Behavior of Silicon Nitride Sputtered Thin Films
AuthID
P-00F-RS4
3
Author(s)
Vila, M
·
Prieto, C
·
Ramirez, R
1
Editor(s)
Hilgers H.Knoll W.Luth H.
Document Type
Proceedings Paper
Year published
2004
Published
in
Thin Solid Films,
ISSN: 0040-6090
Volume: 459, Issue: 1-2, Pages: 195-199
Conference
Proceedings of the Eight European Vacuum Congress Berlin 2003,
Date:
23 June 2004 through 26 June 2004,
Location:
Berlin
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Publication Identifiers
DOI
:
10.1016/j.tsf.2003.12.082
SCOPUS
: 2-s2.0-2942555021
Source Identifiers
ISSN
: 0040-6090
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