Publications

Compact Xuv Excimer Radiation Sources and Their Application

AuthID
P-00F-RTQ

Author(s)

Fedenev, AV

Morozov, A

Wieser, J

Ulrich, A

Editor(s)

Tarasenko V.F.Mayer G.V.Petrash G.G.

Document Type

Proceedings Paper

Year published

2004

Published

in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X

Volume: 5483, Pages: 297-304

Conference

Atomic and Molecular Pulsed Lasers V, Date: 15 September 2003 through 19 September 2003, Location: Tomsk, Sponsors: Russian Academy of Sciences;Siberian Branch of the Russian Academy of Sciences;International Science and Technology Center (Russia);Tomsk Innovation Center of Laser Technology (Russia);Surgut State University (Russia);et al

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