Electrical and Optical Characteristics of Ta2O5 Thin Films Deposited by Electron-Beam Vapor Deposition

AuthID
 P-00F-RZH
6
Author(s)
Todorova, Z
·
Donkov, N
·
Ristic, Z
·
Petrovic, S
·
Petkov, M
Document Type
Proceedings Paper
Year published
2006
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 3, Issue: 2, Pages: 174-178 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-33644527901
Wos: WOS:000235628300014
Source Identifiers
ISSN: 1612-8850
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