Sputter Depth Profiling by Secondary Ion Mass Spectrometry Coupled with Sample Current Measurements

AuthID
 P-00F-SD7
5
Author(s)
Bardi, U
·
Chenakin, SP
·
Lavacchi, A
·
Pagura, C
·
Document Type
Article
Year published
2006
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 252, Issue: 20, Pages: 7373-7382 (10)
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Scopus®
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Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-33747166760
Wos: WOS:000240478100009
Source Identifiers
ISSN: 0169-4332
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