Engineering Of The Energy Coupling In Pecvd Systems Used To Produce Large-Area A-Si-H Coatings

AuthID
 P-001-JJW
2
Author(s)
Document Type
Article
Year published
1994
Published
in VACUUM, ISSN: 0042-207X
Volume: 45, Issue: 10-11, Pages: 1107-1108 (2)
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Publication Identifiers
SCOPUS: 2-s2.0-0028516123
Wos: WOS:A1994PH23600036
Source Identifiers
ISSN: 0042-207X
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