Hydrogen Shuttling Near Hf-Defect Complexes in Si/Sio2/Hfo 2 Structures

AuthID
P-00F-TP7
6
Author(s)
Batyrev, I
·
Zhou, XJ
·
Schrimpf, RD
·
Fleetwood, DM
·
Pantelides, ST
Document Type
Article
Year published
2007
Published
in Applied Physics Letters, ISSN: 0003-6951
Volume: 91, Issue: 23, Pages: 233503
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Publication Identifiers
Scopus: 2-s2.0-36849063705
Source Identifiers
ISSN: 0003-6951
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