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Characterization of Si3N4 Thin Films Prepared by R.f. Magnetron Sputtering
AuthID
P-00F-TZM
5
Author(s)
Vila, M
·
Prieto, C
·
Miranzo, P
·
Osendi, MI
·
Ramirez, R
Document Type
Article
Year published
2002
Published
in
Surface and Coatings Technology,
ISSN: 0257-8972
Volume: 151-152, Pages: 67-71
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Publication Identifiers
DOI
:
10.1016/s0257-8972(01)01600-0
SCOPUS
: 2-s2.0-4243545708
Source Identifiers
ISSN
: 0257-8972
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