Impurity Segregation and Ordering in Si/ Sio2 / Hfo2 Structures

AuthID
 P-00F-V2E
5
Author(s)
Van Benthem, K
·
Rashkeev, SN
·
Pennycook, SJ
·
Pantelides, ST
Document Type
Article
Year published
2008
Published
in Physical Review B - Condensed Matter and Materials Physics, ISSN: 1098-0121
Volume: 77, Issue: 19
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Publication Identifiers
SCOPUS: 2-s2.0-43949138617
Source Identifiers
ISSN: 1098-0121
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