Growth-Induced Surface State in Hydrogenated and Fluorinated Amorphous Silicon

AuthID
P-00F-VDD
5
Author(s)
Maruyama, A
·
Liu, JZ
·
Shen, DS
·
Wagner, S
Document Type
Article
Year published
1991
Published
in Journal of Applied Physics, ISSN: 0021-8979
Volume: 69, Issue: 4, Pages: 2346-2355
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Publication Identifiers
SCOPUS: 2-s2.0-5244251014
Source Identifiers
ISSN: 0021-8979
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