Process Issues with Mo/A-Si:h Schottky Diode and Thin Film Transistors Integration for Direct X-Ray Detection

AuthID
 P-00F-X67
3
Author(s)
Lee, CH
·
Nathan, A
Document Type
Article
Year published
2004
Published
in Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, ISSN: 0734-2101
Volume: 22, Issue: 5, Pages: 2091-2095
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Publication Identifiers
SCOPUS: 2-s2.0-8344241157
Source Identifiers
ISSN: 0734-2101
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