Piezoresistor Sensor Fabrication by Direct Laser Writing on Hydrogenated Amorphous Silicon

AuthID
 P-00F-ZFT
5
Author(s)
Junior, G
·
Gaspar, J
·
Borme, J
Document Type
Proceedings Paper
Year published
2014
Published
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 1594
Conference
2013 Jsap-Mrs Joint Symposia, Date: 16 September 2013 through 20 September 2013, Location: Kyoto
Indexing
Scopus®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84898952915
Source Identifiers
ISSN: 0272-9172
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