High-Growth Rate A-Sih Deposited By Hot-Wire Cvd

AuthID
 P-001-KJ5
3
Author(s)
5
Editor(s)
Schiff, EA; Hack, M; Madan, A; Powell, M; Matsuda, A
Document Type
Proceedings Paper
Year published
1994
Published
in AMORPHOUS SILICON TECHNOLOGY-1994 in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 336, Pages: 67-72 (6)
Conference
Symposium on Amorphous Silicon Technology, at the 1994 Mrs Spring Meeting, Date: APR 04-08, 1994, Location: SAN FRANCISCO, CA, Sponsors: MAT RES SOC
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-84897583848
Wos: WOS:A1994BC30G00011
Source Identifiers
ISSN: 0272-9172
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