Zinc-Oxide Films Prepared By Dc Reactive Magnetron Sputtering At Different Substrate Temperatures

AuthID
 P-001-M5M
3
Author(s)
Document Type
Article
Year published
1994
Published
in VACUUM, ISSN: 0042-207X
Volume: 45, Issue: 1, Pages: 19-22 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-0028193928
Wos: WOS:A1994MM91300005
Source Identifiers
ISSN: 0042-207X
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