Fabrication and Characterization of Pzt Thin Films for Micromotors

AuthID
P-00G-9SZ
6
Author(s)
Muralt, P
·
Kohli, M
·
Maeder, T
·
Brooks, KG
·
Luthier, R
Document Type
Article
Year published
1995
Published
in INTEGRATED FERROELECTRICS, ISSN: 1058-4587
Volume: 11, Issue: 1-4, Pages: 213-220 (8)
Conference
7Th International Symposium on Integrated Ferroelectrics, Date: MAR 20-22, 1995, Location: COLORADO SPRINGS, CO
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0008324669
Wos: WOS:A1995TY23800021
Source Identifiers
ISSN: 1058-4587
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