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Fabrication and Characterization of Pzt Thin Films for Micromotors
AuthID
P-00G-9SZ
6
Author(s)
Muralt, P
·
Kholkin, A
·
Kohli, M
·
Maeder, T
·
Brooks, KG
·
Luthier, R
Document Type
Article
Year published
1995
Published
in
INTEGRATED FERROELECTRICS,
ISSN: 1058-4587
Volume: 11, Issue: 1-4, Pages: 213-220 (8)
Conference
7Th International Symposium on Integrated Ferroelectrics,
Date:
MAR 20-22, 1995,
Location:
COLORADO SPRINGS, CO
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Metadata
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Publication Identifiers
DOI
:
10.1080/10584589508013593
SCOPUS
: 2-s2.0-0008324669
Wos
: WOS:A1995TY23800021
Source Identifiers
ISSN
: 1058-4587
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