Influence of Metal Co-Deposition on Silicon Nanodot Patterning Dynamics During Ion-Beam Sputtering

AuthID
P-00G-A2K
4
Author(s)
Gago, R
·
Palomares, FJ
·
Vazquez, L
Document Type
Article
Year published
2014
Published
in NANOTECHNOLOGY, ISSN: 0957-4484
Volume: 25, Issue: 41, Pages: 415301 (13)
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Publication Identifiers
SCOPUS: 2-s2.0-84907478698
Wos: WOS:000342580300004
Source Identifiers
ISSN: 0957-4484
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