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Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based on Feedback Linearization

AuthID
P-00G-C13

Author(s)

Moreira, EE

Alves, FS

Dias, RA

Costa, M

Fonseca, H

Cabral, J

Gaspar, J

Rocha, LA

Document Type

Proceedings Paper

Year published

2015

Published

in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN: 1084-6999

Volume: 2015-February, Issue: February, Pages: 1036-1039

Conference

2015 28Th Ieee International Conference on Micro Electro Mechanical Systems, Mems 2015, Date: 18 January 2015 through 22 January 2015, Sponsors: IEEE Robotics and Automation Society

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Sources

Publication Identifiers

DOI: 10.1109/memsys.2015.7051139

SCOPUS: 2-s2.0-84931045038

Source Identifiers

ISSN: 1084-6999

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Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based on Feedback Linearization

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