Sub-Micron Gap In-Plane Micromechanical Resonators Based on Low-Temperature Amorphous Silicon Thin-Films on Glass Substrates

AuthID
 P-00G-D12
4
Author(s)
Gualdino, A
·
Document Type
Article
Year published
2015
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 25, Issue: 7, Pages: 075026 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-84937459488
Wos: WOS:000356896100037
Source Identifiers
ISSN: 0960-1317
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