The Influence Of Oxygen Partial-Pressure On The Properties Of Dc Reactive Magnetron-Sputtered Titanium-Oxide Films

AuthID
 P-001-MWR
2
Author(s)
Document Type
Article
Year published
1993
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 68, Issue: 3, Pages: 319-325 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0027625927
Wos: WOS:A1993LL29200005
Source Identifiers
ISSN: 0169-4332
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