Investigations Of Titanium-Oxide Films Deposited By Dc Reactive Magnetron Sputtering In Different Sputtering Pressures

AuthID
 P-001-N5E
2
Author(s)
Document Type
Article
Year published
1993
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 226, Issue: 1, Pages: 22-29 (8)
Indexing
Wos®
Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-0027579223
Wos: WOS:A1993KX14200006
Source Identifiers
ISSN: 0040-6090
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