Publications

Correlation Of Photoluminescence And Nuclear Characterization Of In-Implanted Silicon

AuthID
P-001-NG5

Author(s)

HENRY, MO

KEHOE, TB

NAZARE, MH

FREITAG, K

VIANDEN, R

Document Type

Article

Year published

1993

Published

in APPLIED SURFACE SCIENCE, ISSN: 0169-4332

Volume: 63, Issue: 1-4, Pages: 232-235 (4)

Conference

Symp On Diagnostic Techniques For Semiconductor Materials Analysis And Fabrication Process Control, At The 1992 Spring Conf Of The European Materials Research Soc, Date: JUN 02-05, 1992, Location: STRASBOURG, FRANCE, Sponsors: EUROPEAN MAT RES SOC

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