Publications

AuthID
P-00G-R5E

Author(s)

Document Type

Article

Year published

2015

Published

in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317

Volume: 146, Pages: 6-10 (5)

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Wos^®

Scopus^®

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Publication Identifiers

DOI: 10.1016/j.mee.2015.02.018

Scopus: 2-s2.0-84983296832

Wos: WOS:000362133300003

Source Identifiers

ISSN: 0167-9317

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