High Rate Growth of Nanocrystalline Diamond Films Using High Microwave Power and Pure Nitrogen/Methane/Hydrogen Plasma

AuthID
P-00G-T6W
8
Author(s)
Tang, CJ
·
Fernandes, AJS
·
Granada, M
·
Leitao, JP
·
Jiang, XF
·
Ye, H
Document Type
Article
Year published
2015
Published
in VACUUM, ISSN: 0042-207X
Volume: 122, Pages: 342-346 (5)
Conference
Joint Meeting on the 13Th European Vacuum Conference / 7Th European Topical Conference on Hard Coatings / 9Th Iberian Vacuum Meeting, Date: SEP 08-12, 2014, Location: Aveiro, PORTUGAL
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Publication Identifiers
Scopus: 2-s2.0-84945491415
Wos: WOS:000364732200018
Source Identifiers
ISSN: 0042-207X
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