Influence Of Deposition Conditions On The Morphology Of Sputtered W-C-(Co) Films

AuthID
P-001-PJZ
Document Type
Article
Year published
1992
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 213, Issue: 1, Pages: 6-12 (7)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0002291034
Wos: WOS:A1992HX79200002
Source Identifiers
ISSN: 0040-6090
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