Influence of Deposition Conditions on the Morphology of Sputtered W-C-(Co) Films

AuthID
 P-00H-659
3
Author(s)
Vieira, M
·
Lemperiere, G
Document Type
Article
Year published
1992
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 213, Issue: 1, Pages: 6-12
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Source Identifiers
ISSN: 0040-6090
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