The Effect of Substrate Temperature on the Properties of D.c. Reactive Magnetron Sputtered Titanium Oxide Films

AuthID
 P-00H-65B
3
Author(s)
dos Santos, M
Document Type
Article
Year published
1993
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 223, Issue: 2, Pages: 242-247
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ISSN: 0040-6090
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