Study of Tungsten Sputtered Films with Low Nitrogen Content

AuthID
 P-00H-65Y
3
Author(s)
Castanho, J
·
Vieira, M
Document Type
Article
Year published
1994
Published
in Vacuum, ISSN: 0042-207X
Volume: 45, Issue: 10-11, Pages: 1051-1053
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Source Identifiers
ISSN: 0042-207X
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