Macrocrystalline Silicon Thin Films Prepared by Rf Reactive Magnetron Sputter Deposition

AuthID
 P-00H-66A
5
Author(s)
Cerqueira, M
·
Rebouta, L
·
Ferreira, J
·
da Silva, M
Document Type
Article
Year published
1995
Published
in Vacuum, ISSN: 0042-207X
Volume: 46, Issue: 12, Pages: 1385-1390
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ISSN: 0042-207X
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