Epitaxial Regrowth and Lattice Location of Indium Implanted in Arsenic-Preamorphized Silicon

AuthID
 P-00H-6EV
9
Author(s)
Da Silva, M
·
Soares, J
·
Melo, A
·
May, J
·
Haslar, V
·
Seidl, P
·
Feuser, U
·
Vianden, R
Document Type
Article
Year published
1991
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 55, Issue: 1-4, Pages: 580-584
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ISSN: 0168-583X
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