Production and Characterization of Si-N Films Obtained by R.f. Magnetron Sputtering

AuthID
 P-00H-6GW
3
Author(s)
Oliveira, A
·
Vieira, M
Document Type
Article
Year published
1993
Published
in Surface and Coatings Technology, ISSN: 0257-8972
Volume: 60, Issue: 1-3, Pages: 463-467
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ISSN: 0257-8972
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