Structural, Mechanical and Piezoelectric Properties of Polycrystalline Aln Films Sputtered on Titanium Bottom Electrodes

AuthID
 P-00H-7K6
8
Author(s)
Pătru, M
·
Isac, L
·
Oncioiu, G
·
Cristea, D
·
Munteanu, D
Document Type
Article
Year published
2015
Published
in Applied Surface Science, ISSN: 0169-4332
Volume: 354, Pages: 267-278
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ISSN: 0169-4332
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