Effect of Rapid Thermal Annealing on the Composition of Au/Ti/Al/Ti Ohmic Contacts for Gan-Based Microdevices

AuthID
 P-00H-CJW
5
Author(s)
Ynsa, M
·
Romero, M
·
Alves, L
·
Muñoz, E
Document Type
Article
Year published
2013
Published
in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN: 0168-583X
Volume: 306, Pages: 212-217
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ISSN: 0168-583X
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