Structure and Chemical Bonds in Reactively Sputtered Black Ti–C–N–O Thin Films

AuthID
P-00H-EGS
10
Author(s)
Chappé, J
·
Marco de Lucas, M
·
Pierson, J
·
Imhoff, L
·
Heintz, O
·
Potin, V
·
Bourgeois, S
·
Document Type
Article
Year published
2011
Published
in Thin Solid Films, ISSN: 0040-6090
Volume: 520, Issue: 1, Pages: 144-151
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ISSN: 0040-6090
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