High Rate Growth of Nanocrystalline Diamond Films Using High Microwave Power and Pure Nitrogen/Methane/Hydrogen Plasma

AuthID
 P-00H-EK9
8
Author(s)
Tang, C
·
Fernandes, A
·
Granada, M
·
Leitão, J
·
Jiang, X
·
Pinto, J
·
Ye, H
Document Type
Article
Year published
2015
Published
in Vacuum, ISSN: 0042-207X
Volume: 122, Pages: 342-346
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ISSN: 0042-207X
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