Absolute Photo-Absorption Cross Sections and Electronic State Spectroscopy of Selected Fluorinated Hydrocarbons Relevant to the Plasma Processing Industry

AuthID
 P-00H-GDK
3
Author(s)
Eden, S
·
Mason, N
Document Type
Article
Year published
2003
Published
in Radiation Physics and Chemistry, ISSN: 0969-806X
Volume: 68, Issue: 1-2, Pages: 187-192
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ISSN: 0969-806X
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