Tem Investigation of Counter-Electrode Structure in Ta Capacitors

AuthID
 P-00H-H7H
4
Author(s)
Dias, D
·
Ferro, AC
·
Lohwasser, W
Document Type
Article
Year published
2005
Published
in Microscopy and Microanalysis - MAM, ISSN: 1431-9276
Volume: 11, Issue: S02
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ISSN: 1431-9276
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