Optoelectronic Properties of Hydrogenated Amorphous Silicon Films Deposited Under Negative Substrate Bias

AuthID
 P-00H-MBH
7
Author(s)
Roca i Cabarrocas, P
·
Morin, P
·
Liu, JZ
·
Park, HR
·
Wagner, S
Document Type
Article
Year published
1991
Published
in J. Appl. Phys. - Journal of Applied Physics, ISSN: 0021-8979
Volume: 69, Issue: 5, Pages: 2942
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ISSN: 0021-8979
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