Ultrasmooth Growth of Amorphous Silicon Films Through Ion-Induced Long-Range Surface Correlations

AuthID
 P-00H-MCF
3
Author(s)
Gago, R
·
Vázquez, L
Document Type
Article
Year published
2011
Published
in Appl. Phys. Lett. - Applied Physics Letters, ISSN: 0003-6951
Volume: 98, Issue: 1, Pages: 011904
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ISSN: 0003-6951
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