On the Structural, Optical and Electronic Properties of Microcrystalline Si:o:c:h Thin Films Prepared in a Two-Consecutive-Decomposition-Deposition-Chamber System

AuthID
 P-00H-MZY
2
Author(s)
Willeke, G
·
Document Type
Article
Year published
1991
Published
in Philosophical Magazine Part B, ISSN: 1364-2812
Volume: 63, Issue: 1, Pages: 79-86
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ISSN: 1364-2812
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